Honeywell Introduces 13MM Pressure Sensor for Semiconductor Manufacturing

Honeywell has announced the introduction of its 13MM Pressure Sensor, a new pressure sensor designed for cleanroom environments. The sensor supports manufacturing in high-purity industries, such as semiconductor production, where minimizing contaminants and defects and maximizing yield are essential.

“Quality is everything in the semiconductor space,” said Carmen Becker, president of Honeywell Sensing Solutions. “As the industry continues to grow and advance, there is an increased need for wafer fabrication technologies that can operate effectively without introducing impurities into the process. By integrating sensing innovations like the 13MM Pressure Sensor, we can help enable precise measurement and more reliable manufacturing for the semiconductor sector.”

Unlike other pressure sensors that can “drift” in vacuum environments, which can lead to less accurate readings over time, Honeywell’s 13MM Pressure Sensor can perform accurately under high-pressure and high-temperature conditions with minimal offset drift. The sensor—used for various gases that are common in semiconductor manufacturing—can help equipment operate with precision and create wafer features that adhere to precise specifications.

The sensor is designed to comply with strict metal composition and surface roughness requirements for the semiconductor industry (SEMI F20), helping to ensure that minimal impurities are introduced from the sensor into the manufacturing process. It also helps reduce defects and improve overall yield, resulting in less wafer scraps during processing. 

In addition to semiconductor processing, the 13MM Pressure Sensor can also be used in other industries requiring ultra-high purity environments such as solar panel manufacturing, display manufacturing, biopharmaceutical production, food and beverage production, advanced optics and medical equipment manufacturing.